FOUPs And Silicon Wafer Processing

What Are FOUPs and Why Are They So Important?

Author:

September 11, 2024

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Silicon wafer processing is a complex process that involves several steps. First, silicon is extracted and formed into ingots. Next, it’s sliced and polished. Once the desired result is achieved, it can then be tested to ensure it meets the industry’s quality standards.

Throughout this several-step process, it’s necessary to ensure the transported wafers remain clean, uncontaminated, and free of harm. FOUPs are used to achieve this. But what are these special types of boxes?

The Importance of FOUPs for Wafer Transportation

Wafers are moved around fabrication facilities in specialized sealed plastic boxes known as FOUPs. These have an internal nitrogen atmosphere that keeps copper from oxidizing on the wafers. Modern semiconductors use copper for their wiring.

In fact, the cleanroom's internal air is kept cleaner than the processing machinery and FOUPs. This increases yield, or the quantity of functional devices on a wafer.

Many wafer-handling equipment operate in vacuum chambers or clean nitrogen environments to minimize contamination and ensure precise process control. As a result, fabrication plants require a significant amount of liquid nitrogen to maintain a constant atmosphere within production equipment and nitrogen-purged FOUPs.

Learn More About Silicon Wafer Processing

When it comes to wafers and semiconductors, the quality of the product is entirely dependent on the steps taken during the manufacturing process. Ensuring that the production facilities adhere to strict standards is a critical factor in achieving high-quality products.

Liquid nitrogen has become a crucial input in wafer manufacturing, and it offers several noticeable benefits, like increasing the amount of yield a semiconductor possesses. If you’re interested in learning more about silicon wafer processing, reach out to Wafer World!

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